FUKUTEN FOUR-POINT PROBE SYSTEM T2001A4

Voltage Range ±100 μV to ±10 V Current Range ±1 μA to ±200 mA (5 ranges) Sheet Resistance Range 100 mΩ/□ to 10 MΩ/□ (ohms per square) Sheet Resistance Accuracy* Precision** Measured at Range 100 mΩ/□ ±8% ±3% 200 mA 1 Ω/□ ±2% ±0.5% 200 mA 10 Ω/□ ±1% ±0.5% 200 mA 100 Ω/□ ±1% ±0.05% 20 mA 1 kΩ/□ ±1% ±0.03% 20 mA 10 kΩ/□ ±1% ±0.02% 2000 µA 100 kΩ/□ ±2% ±0.05% 200 µA 1 MΩ/□ ±8% ±0.5% 20 µA 10 MΩ/□ ±30% ±5% 20 µA